Flexible Capacitive Tactile Sensor Array With Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement

被引：158

作者：

Liang, Guanhao ^{[1
,2
]}

Wang, Yancheng ^{[3
]}

Mei, Deqing ^{[1
,2
]}

Xi, Kailun ^{[1
,2
]}

Chen, Zichen ^{[3
]}

机构：

[1] Zhejiang Univ, Sch Mech Engn, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Zhejiang, Peoples R China

[2] Zhejiang Univ, Sch Mech Engn, Key Lab Adv Mfg Technol Zhejiang Prov, Hangzhou 310027, Zhejiang, Peoples R China

[3] Zhejiang Univ, Sch Mech Engn, Hangzhou 310027, Zhejiang, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 05期

基金：

中国国家自然科学基金;

关键词：

Capacitive tactile senor; flexible sensor array; truncated polydimethylsiloxane pyramid; three-axis force measurement; PRESSURE;

D O I：

10.1109/JMEMS.2015.2418095

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a flexible capacitive tactile sensor array embedded with a truncated polydimethylsiloxane pyramid array as a dielectric layer. The proposed sensor array has been fabricated with 4 x 4 sensor units. The measurement ranges of forces in the x-axis, y-axis, and z-axis are 0-0.5, 0-0.5, and 0-4 N, respectively. In the range of 0-0.5 N, the sensitivities of the sensor unit are 58.3%/N, 57.4%/N, and 67.2%/N in the x-axis, y-axis, and z-axis, respectively. In the range of 0.5-4 N, the sensitivity in the z-axis is 7.7%/N. Three-axis force measurement has been conducted for all the sensor units. The average errors between the applied and calculated forces are 11.8% +/- 6.4%. The sensor array has been mounted on a prosthetic hand. A paper cup and a cube are grasped by the prosthetic hand and the three-axis contact force is measured in real time by the sensor array. Results show that the sensor can capture the three-axis contact force image both in light and tight grasping. The proposed capacitive tactile sensor array can be utilized in robotics and prosthetic hand applications. [2014-0350]

引用

页码：1510 / 1519

页数：10