Effect of N+ ion implantation on micro/nanotribological properties of nanocrystalline diamond films

被引：9

作者：

Panda, Kalpataru ^{[1
]}

Kumar, N. ^{[1
]}

Panigrahi, B. K. ^{[1
]}

Polaki, S. R. ^{[1
]}

Dash, S. ^{[1
]}

Tyagi, A. K. ^{[1
]}

Lin, I-Nan ^{[2
]}

机构：

[1] Indira Gandhi Ctr Atom Res, Kalpakkam 603102, Tamil Nadu, India

[2] Tamkang Univ, Dept Phys, Tamsui, Taiwan

来源：

TRIBOLOGY INTERNATIONAL | 2013年 / 57卷

关键词：

Nanocrystalline diamond films; Superhydrophobicity; Ultra low friction coefficient; ELASTIC-MODULUS; CARBON-FILMS; LOW-FRICTION; COATINGS; RAMAN; WETTABILITY; HARDNESS;

D O I：

10.1016/j.triboint.2012.08.005

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Nanocrystalline diamond (NCD) films are prospective materials for micro/nanoelectromechanical systems (M/NEMS), due to their unique mechanical and tribological properties. In the present study, we report N+ ion implantation on NCD films, which exhibit superhydrophobic properties and ultra low friction coefficient contrary to as-deposited films. Interestingly, in microtribo-test, super low friction coefficient is observed due to the formation of carbonaceous transferlayer on the ball counter body. However, in nanotribo-test, high friction coefficient is obtained which is caused by severe deformation of ball due to the absence of stable transfer layer. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：184 / 194

页数：11

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