Micro-Raman spectroscopy investigation of the electron beam irradiation of LiNbO3 surface for 2D photonic band gap grating inscription

被引：8

作者：

Beghoul, M. R. ^{[1
]}

Boudrioua, A. ^{[1
]}

Kremer, R. ^{[1
]}

Fontana, M. D. ^{[1
]}

Fougere, B. ^{[2
]}

Darraud, C. ^{[2
]}

Vareille, J. C. ^{[2
]}

Moretti, P. ^{[3
]}

机构：

[1] Univ Metz & Supelec, CNRS, UMR 7132, LMOPS, F-57070 Metz, France

[2] Univ Limoges, CNRS, Inst Rech XLIM, UMR 6172, F-87060 Limoges, France

[3] Univ Lyon 1, CNRS, UMR 5620, LPCML, Lyon, France

来源：

OPTICAL MATERIALS | 2008年 / 31卷 / 02期

关键词：

Photonic crystals; LiNbO3; Micro-Raman; e-Beam;

D O I：

10.1016/j.optmat.2008.02.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report the investigation of the physical phenomena which occur in LiNbO3 during its surface irradiation by electron beam (EB) in order to fabricate 2D photonic band gap (PBG) grating. In order to better understand the mechanism of unusual holes formation by post-chemical etching, the induced micro structural modifications are studied by means of micro-Raman microscopy. We carried out EB bombardment on substrates of congruent z-cut lithium niobate. The main objective consists of the optimization of PBG grating fabrication process for applications in the field of optical telecommunications. (C) 2008 Published by Elsevier B.V.

引用

页码：136 / 142

页数：7

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