MEMS Deformable Mirrors: Technology and Applications

被引：2

作者：

Gupta, Amita ^{[1
]}

Singh, R. ^{[1
]}

Kumar, Monika Chaudhary Shailesh ^{[1
]}

Meena, A. K. ^{[1
]}

机构：

[1] Solid State Phys Lab, Delhi 110054, India

来源：

16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES | 2012年 / 8549卷

关键词：

Deformable Mirror; MEMS; Adaptive optics; micromachining; SYSTEM;

D O I：

10.1117/12.925268

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.

引用

页数：6

共 7 条

[1] Boysel R. M., 1992, SPIE, V1793
[2] Deformable Membrane Mirror for Wavefront Correction
Gupta, Amita
Kumar, Shailesh
Singh, Ranvir
Chaudhary, Monika
Meena, A. K.
Sarvanan, V. K.
[J]. DEFENCE SCIENCE JOURNAL, 2009, 59 (06) : 590 - 594
[3] Adaptive optic correction using microelectromechanical deformable mirrors
Perreault, JA
Bifano, TG
Levine, BM
Horenstein, MN
[J]. OPTICAL ENGINEERING, 2002, 41 (03) : 561 - 566
[4] Experimental results of a MEM based adaptive optics system
Restaino, SR
Gilbreath, GC
Payne, DT
Andrews, J
[J]. MOEMS DISPLAY AND IMAGING SYSTEMS II, 2004, 5348 : 160 - 165
[5] Spherical aberration correction system using an adaptive optics deformable mirror
Schwertner, M.
Booth, M. J.
Tanaka, T.
Wilson, T.
Kawata, S.
[J]. OPTICS COMMUNICATIONS, 2006, 263 (02) : 147 - 151
[6] Vdovin G., 1995, APPL OPTICS, V34, P2965
[7] Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation
Zhu, LJ
Sun, PC
Bartsch, DU
Freeman, WR
Fainman, Y
[J]. APPLIED OPTICS, 1999, 38 (01) : 168 - 176

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