High-Response Room-Temperature NO2 Sensor and Ultrafast Humidity Sensor Based on SnO2 with Rich Oxygen Vacancy

被引:127
作者
Zhong, Yujia [1 ,2 ]
Li, WeiWei [3 ,4 ]
Zhao, Xuanliang [1 ,2 ]
Jiang, Xin [1 ,2 ]
Lin, Shuyuan [1 ,2 ]
Zhen, Zhen [1 ,2 ]
Chen, Wenduo [1 ,2 ]
Xie, Dan [3 ]
Zhu, Hongwei [1 ,2 ]
机构
[1] Tsinghua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Ctr Nano & Micro Mech, Sch Mat Sci & Engn, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Inst Microelect, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China
[4] Air Force Engn Univ, Dept Basic Sci, Xian 710051, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
tin dioxide; tin selenide; nanosheet; oxygen vacancy; NO2 gas sensor; humidity sensor; REDUCED GRAPHENE OXIDE; GAS-SENSING PROPERTIES; THIN-FILMS; PERFORMANCE; SURFACE; NANOCOMPOSITES; NANOPARTICLES; SENSITIVITY; NANOSHEETS; DISULFIDE;
D O I
10.1021/acsami.9b01737
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
SnO2 nanosheets with abundant vacancies (designated as SnO2-x) have been successfully prepared by annealing SnSe nanosheets in Argon. The transmission electron microscopy results of the prepared SnO2 nanosheets indicated that high-density SnO2-x nanoplates with the size of 5-10 nm were distributed on the surface of amorphous carbon. After annealing, the acquired SnO(2-x)x/amorphous carbon retained the square morphology. The stoichiometric ratio of Sn/O = 1:1.55 confirmed that oxygen vacancies were abundant in SnO2 nanosheets. The, prepared SnO2-x exhibited excellent performance of sensing NO2 at room temperature. The response of the SnO2-x-based sensor to 5 ppm NO2 was determined to be 16 with the response time and recovery time of 331 and 1057 s, respectively, which is superior to those of most reported room-temperature NO2 sensors based on SnO2 and other materials. When the humidity varied from 30 to 40%, AR/R was 0.025. The ultrafast humidity response (52 ms) and recovery (140 ms) are competitive compared with other state-of-art humidity sensors. According to the mechanistic study, the excellent sensing performance of SnO2-x is attributed to its special structure.
引用
收藏
页码:13441 / 13449
页数:9
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