Neutron irradiation and forming gas anneal impact on β-Ga2O3deep level defects

We used depth-resolved cathodoluminescence spectroscopy (DRCLS), absorption spectroscopy, and temperature-dependent Hall effect (TDH) measurements to study the effects of fluence dependent neutron irradiations on deep level defects and the associated changes of electrical properties of beta-Ga(2)O(3)grown by low pressure chemical vapor deposition and pulsed laser deposition. DRCLS enabled us to monitor systematic increases of three deep level defects after neutron irradiation which correlated with TDH measurements of significant free carrier removal and mobility decrease. The correlations between defect profiles and electrical property changes vs. irradiation dose link these dominant electrically active native point defects in Ga(2)O(3)with their contributions to free carrier mobility, carrier density, and donor/acceptor depth profiles, further revealing their donor/acceptor electrical behavior and physical nature, consistent with the formation of compensating defects. After irradiation, temperature-dependent forming gas (FG) anneals were performed to reverse the radiation-induced damage and carrier removal. The evolution of defect concentrations with increasing neutron dose and their depth-resolved distributions with FG anneal temperature reveal an interplay between specific defects to control electronic properties.