Highly Transpearent Submicrometer-Sclae Amorphous Silicon Waveguide for Backend Optical Interconnect

被引：0

作者：

Takei, Ryohei ^{[1
,2
]}

Manako, Shoko ^{[1
,2
]}

Omoda, Emiko ^{[1
,2
]}

Mori, Masahiko ^{[1
,2
]}

Sakakibara, Youichi ^{[1
,2
]}

Kamei, Toshihiro ^{[1
,2
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan

[2] Inst Photon Elect Convergence Syst Technol PECST, Tsukuba, Ibaraki 3058568, Japan

来源：

2014 IEEE OPTICAL INTERCONNECTS CONFERENCE | 2014年

关键词：

silicon photonics; optical waveguide; on-chip optical interconnect; hydrogenated amorphous silicon;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a submicron-scale hydrogenated amorphous silicon (a-Si:H) waveguide with a propagation loss of 0.90 +/- 0.02 dB/cm because of the very low infrared optical absorption of our low defect a-Si:H film.

引用

页码：135 / 136

页数：2

共 6 条

[1]

Han B., 2007, Testbeds and Research Infrastructure for the Development of Networks and 126 Communities, P1

[2] Deposition and extensive light soaking of highly pure hydrogenated amorphous silicon [J].

Kamei, T ;

Hata, N ;

Matsuda, A ;

Uchiyama, T ;

Amano, S ;

Tsukamoto, K ;

Yoshioka, Y ;

Hirao, T .

APPLIED PHYSICS LETTERS, 1996, 68 (17) :2380-2382

[3]

Rao S., 2010, J EUROP OPT SOC RAP, V5

[4] Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry [J].

Selvaraja, Shankar Kumar ;

Sleeckx, Erik ;

Schaekers, Marc ;

Bogaerts, Wim ;

Van Thourhout, Dries ;

Dumon, Pieter ;

Baets, Roel .

OPTICS COMMUNICATIONS, 2009, 282 (09) :1767-1770

[5]

SMITH ZE, 1987, PHYS REV LETT, V59, P1790, DOI 10.1103/PhysRevLett.59.1790.3

[6]

Sparacin DK, 2006, 2006 3RD IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, P255

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