Design, characterization and applications of multilayer micro-optics

被引：5

作者：

Grunwald, R ^{[1
]}

Nerreter, S ^{[1
]}

Griebner, U ^{[1
]}

Kühn, HJ ^{[1
]}

机构：

[1] Max Born Inst Nonlinear Opt & Short Pulse Spect, D-12489 Berlin, Germany

来源：

GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II | 2001年 / 4437卷

关键词：

micro-optics; thin-films; multilayer; nonuniform; micro-mirrors; graded AR-coatings;

D O I：

10.1117/12.448158

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Multilayer micro-optics combines refractive beam shaping with wavelength selective multiple interference. Layer composition and thickness distribution were optimized by advanced simulation software. Components were fabricated by mask-shaded vapor deposition with planetary rotation. Surface profiles were characterized interferometrically. For two-dimensional reflectance mapping, a high-accuracy automated system was developed. Micro-mirror arrays for self-imaging resonators, mode selective mirrors for miniaturized solid-state lasers and angular-adapted graded AR-coatings for microlenses are presented as applications.

引用

页码：40 / 49

页数：10

共 29 条

[1] Abeles F, 1950, ANN PHYS-PARIS, V5, P596, DOI DOI 10.1051/ANPHYS/195012050596
[2] Abeles F., 1950, ANN PHYS-PARIS, V5, P706
[3] BUDZINSKI C, 1991, P SOC PHOTO-OPT INS, V1500, P264, DOI 10.1117/12.46838
[4] DAI Z, 1996, CLEO 96 AN, P416
[5] Generation of thin film microoptics by crossed deposition through wire-grid masks
Griebner, U
Grunwald, R
[J]. MICROSYSTEMS METROLOGY AND INSPECTION, 1999, 3825 : 136 - 143
[6] Axial beam shaping with nonspherical microoptics
Grunwald, R
Woggon, S
Griebner, U
Ehlert, R
Reinecke, W
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (6B): : 3701 - 3707
[7] Thin-film microlens arrays with non-spherical elements
Grunwald, R
Woggon, S
Ehlert, R
Reinecke, W
[J]. PURE AND APPLIED OPTICS, 1997, 6 (06): : 663 - 671
[8] Generation of femtosecond Bessel beams with microaxicon arrays
Grunwald, R
Griebner, U
Tschirschwitz, F
Nibbering, ETJ
Elsaesser, T
Kebbel, V
Hartmann, HJ
Jüptner, W
[J]. OPTICS LETTERS, 2000, 25 (13) : 981 - 983
[9] Microlens formation by thin-film deposition with mesh-shaped masks
Grunwald, R
Mischke, H
Rehak, W
[J]. APPLIED OPTICS, 1999, 38 (19) : 4117 - 4124
[10] OPTIMIZATION OF A COHERENT TE-CO2-LASER WITH VARIABLE REFLECTIVITY OUTCOUPLERS
GRUNWALD, R
SCHONNAGEL, H
VOIGT, B
GUHR, J
MITREITER, A
PINZ, I
BLECK, J
[J]. INFRARED PHYSICS, 1991, 32 : 109 - 127

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