Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer

被引:0
|
作者
Liu, Yuntao [1 ]
Liu, Xiaowei [2 ]
Chen, Weiping [2 ]
Wu, Qun [2 ]
机构
[1] Harbin Engn Univ, Coll Informat & Commun Engn, Harbin 150001, Peoples R China
[2] Harbin Inst Technol, MEMS Ctr, Harbin 150001, Peoples R China
来源
MEMS/NEMS NANO TECHNOLOGY | 2011年 / 483卷
关键词
Accelerometer; Sigma-delta; Stability; High-order; MODULATION;
D O I
10.4028/www.scientific.net/KEM.483.716
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A nonlinearity model including distortion components for sigma-delta (Sigma Delta) accelerometer that allows stability analysis is described. Based on this model, closed-loop stability and signal dependent stability are analyzed detailedly. To verify the conclusions, Matlab/Simulink model for a fourth-order Sigma Delta accelerometer is designed. The simulation results indicate that high-order system needs a large compensation coefficient, and it will not affect the performance due to the very high low-frequency gain of the loop filter. High-order system is conditionally stable, and stability is affected by the input signal.
引用
收藏
页码:716 / +
页数:2
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