An electromechanical membrane resonator

被引：37

作者：

Hatanaka, D. ^{[1
]}

Mahboob, I. ^{[1
]}

Okamoto, H. ^{[1
]}

Onomitsu, K. ^{[1
]}

Yamaguchi, H. ^{[1
]}

机构：

[1] NTT Corp, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan

来源：

APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 06期

关键词：

QUANTUM GROUND-STATE; NANOMECHANICAL SYSTEMS; MECHANICAL RESONATOR; MOTION; CAVITY; OSCILLATOR;

D O I：

10.1063/1.4742868

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An electrically active membrane-based mechanical resonator was fabricated from a GaAs/AlGaAs heterostructure. The mechanical motion of the membrane was piezoelectrically excited and detected. The piezoelectric transducer could also excite a range of resonance modes in the membrane that were identified and mapped via optical interferometry. Furthermore, the various mode shapes combined with the piezoelectric transduction could be used to execute mechanical-logic-gates. The development of an electrically active membrane-based mechanical resonator paves the way towards responsive electromechanical detectors and highly functional opto-electro-mechanical systems. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4742868]

引用

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