New volatile heterocyclic metal diketonates for MOCVD

被引：8
|
作者：
Drozdov, A
Troyanov, S
Fedorchenko, O
Battiston, G
Pettinari, C
Marchetti, F
Cingolani, A
机构：
[1] Moscow State Univ, Dept Inorgan Chem, Moscow 119899, Russia
[2] CNR, ICTIMA, I-35127 Padua, Italy
[3] Univ Camerino, Dipartimento Sci Chim, I-62032 Camerino, Italy
来源：
JOURNAL DE PHYSIQUE IV | 1999年 / 9卷 / P8期
关键词：
D O I：
10.1051/jp4:19998117
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The new type of beta-diketonate ligand, 4-acylpyrazol-5-ones were used for preparation of copper(II) and barium complexes. Two copper and two barium complexes containing neutral N- and O-donor ligands (such as phen, dipy, tetraglyme) have been structurally characterized by single crystal X-ray diffractometry. The volatility of copper compounds obtained has been studied. The preliminary CVD experiments have bern conducted.
引用
收藏
页码：929 / 934
页数：6
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