New volatile heterocyclic metal diketonates for MOCVD

被引：8

作者：

Drozdov, A

Troyanov, S

Fedorchenko, O

Battiston, G

Pettinari, C

Marchetti, F

Cingolani, A

机构：

[1] Moscow State Univ, Dept Inorgan Chem, Moscow 119899, Russia

[2] CNR, ICTIMA, I-35127 Padua, Italy

[3] Univ Camerino, Dipartimento Sci Chim, I-62032 Camerino, Italy

来源：

JOURNAL DE PHYSIQUE IV | 1999年 / 9卷 / P8期

关键词：

D O I：

10.1051/jp4:19998117

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The new type of beta-diketonate ligand, 4-acylpyrazol-5-ones were used for preparation of copper(II) and barium complexes. Two copper and two barium complexes containing neutral N- and O-donor ligands (such as phen, dipy, tetraglyme) have been structurally characterized by single crystal X-ray diffractometry. The volatility of copper compounds obtained has been studied. The preliminary CVD experiments have bern conducted.

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页码：929 / 934

页数：6

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