Chemical Etching Technique for Investigations of a Structure of Annealed and Unannealed Proton Exchange Channel LiNbO3 Waveguides

被引：7

作者：

Azanova, I. S. ^{[1
]}

Shevtsov, D. I. ^{[1
]}

Zhundrikov, A. V. ^{[1
]}

Kichigin, V. I. ^{[1
]}

Petukhov, I. V. ^{[1
]}

Volyntsev, A. B. ^{[1
]}

机构：

[1] Perm State Univ, Perm, Russia

来源：

FERROELECTRICS | 2008年 / 374卷

关键词：

Lithium niobate; proton exchange; wet etching; channel waveguides;

D O I：

10.1080/00150190802427234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The proton exchanged channel waveguides are actively used for different integrated-optic components. There is a problem of the channel waveguide characterization because the single-mode channel waveguides for infrared region have the cross section about several microns. The wet etching and noncontact profilometry were used to investigate phase composition in proton exchanged channel waveguide. It has been found the known phases of HxLi1-xNbO3 have noticeably different etching rates. So, obtained experimental data gives the possibility of phase composition identification for channels with cross-section down to similar to 2 mu m.

引用

页码：254 / 265

页数：12

共 14 条

[1] Etching effect on periodic domain structures of lithium niobate crystals [J].