An imaging SIMS study on the tribological properties of boron carbide thin films

被引：4

作者：

Tavsanoglu, Tolga ^{[1
]}

Jeandin, Michel ^{[2
]}

Addemir, Okan ^{[1
]}

Agirseven, Okan ^{[1
]}

Yucel, Onuralp ^{[1
]}

机构：

[1] Istanbul Tech Univ, Dept Met & Mat Engn, TR-34469 Istanbul, Turkey

[2] MINES ParisTech, Ctr Mat, CNRS UMR 7633, Evry, France

来源：

SURFACE AND INTERFACE ANALYSIS | 2013年 / 45卷 / 01期

关键词：

SIMS ion imaging; boron carbide thin films; wear; tribology; CARBON-FILMS; COATINGS; BEHAVIOR; NITRIDE; TESTS; WEAR;

D O I：

10.1002/sia.5035

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study, boron carbide thin films were deposited on AISI M2 grade high-speed steel substrates by plasma-enhanced DC magnetron sputtering of an 'in-house' produced boron carbide target material. Tribological properties of the coatings have been evaluated by a 'pin-on-disc' tribometer. Wear tracks on boron carbide thin films were investigated by scanning electron microscopy-energy dispersive spectroscopy, electron probe microanalysis and secondary ion mass spectrometry (SIMS) elemental ion imaging. The results of analyses provided information about the reliability of the SIMS ion imaging compared to the other investigation techniques on nano-layers and nano-sized thin films. Copyright (C) 2012 John Wiley & Sons, Ltd.

引用

页码：587 / 591

页数：5

共 21 条

[1] Tribological behavior of sputtered boron carbide coatings and the influence of processing gas
Ahn, HS
Cuong, PD
Shin, KH
Lee, KS
[J]. WEAR, 2005, 259 : 807 - 813
[2] Boron carbide and boron carbonitride thin films as protective coatings in ultra-high density hard disk drives
Chen, YF
Chung, YW
Li, SY
[J]. SURFACE & COATINGS TECHNOLOGY, 2006, 200 (12-13) : 4072 - 4077
[3] Effects of relative humidity on tribological properties of boron carbide coating against steel
Cuong, Pham Duc
Ahn, Hyo-Sok
Yoon, Eui-Sung
Shin, Kyung-Ho
[J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) : 4230 - 4235
[4] Cwil M, 2007, REV ADV MATER SCI, V15, P253
[5] Improving tribological properties of sputtered boron carbide coatings by process modifications
Eckardt, T
Bewilogua, K
van der Kolk, G
Hurkmans, T
Trinh, T
Fleischer, W
[J]. SURFACE & COATINGS TECHNOLOGY, 2000, 126 (01) : 69 - 75
[6] Tribology of naturally occurring boric acid films on boron carbide
Erdemir, A
Bindal, C
Zuiker, C
Savrun, E
[J]. SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3) : 507 - 510
[7] Self-replenishing solid lubricant films on boron carbide
Erdemir, A
Eryilmaz, OL
Fenske, GR
[J]. SURFACE ENGINEERING, 1999, 15 (04) : 291 - 295
[8] TOF-SIMS and XPS characterization of diamond-like carbon films after tests in inert and oxidizing environments
Eryilmaz, O. L.
Erdemir, A.
[J]. WEAR, 2008, 265 (1-2) : 244 - 254
[9] Surface analytical investigation of nearly-frictionless carbon films after tests in dry and humid nitrogen
Eryilmaz, O. L.
Erdemir, A.
[J]. SURFACE & COATINGS TECHNOLOGY, 2007, 201 (16-17) : 7401 - 7407
[10] Synthesis and characterization of single and multilayer boron nitride and boron carbide thin films grown by magnetron sputtering of boron carbide
Guruz, MU
Dravid, VP
Chung, YW
[J]. THIN SOLID FILMS, 2002, 414 (01) : 129 - 135

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