Micromachined systems for RF and microwave antenna applications

被引：2

作者：

Vinoy, KJ ^{[1
]}

Sharma, PK ^{[1
]}

Jose, KA ^{[1
]}

Varadan, VK ^{[1
]}

Varadan, VV ^{[1
]}

机构：

[1] Penn State Univ, Ctr Engn Elect & Acoust Mat & Devices, University Pk, PA 16802 USA

来源：

SMART STRUCTURES AND MATERIALS 2001: SMART ELECTRONICS AND MEMS | 2001年 / 4334卷

关键词：

RF-MEMS; micromachined systems; RF-MEMS switches; MEMS phase shifters; ferroelectric; thin films;

D O I：

10.1117/12.436595

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper provides a brief review of applications for MEMS based systems in microwave and millimeter wave systems. MEMS based switches, capacitors, inductors, phase shifters and micromachined transmission lines and antennas find increasing applications in recent years. Approaches towards the design and fabrication of two MEMS components such as phase shifters and switches, both making use of high dielectric barium strontium titanate (BST) thin films to improve the performance characteristics are also presented. Electrostatic micro switches made with this approach can be actuated with very low voltages.

引用

页码：156 / 163

页数：8

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