Nucleation and orientation of sol-gel PZT-films on Pt electrodes

被引：52
作者：
Willems, GJ [1 ]
Wouters, DJ [1 ]
Maes, HE [1 ]
Nouwen, R [1 ]
机构：
[1] LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM
来源：
INTEGRATED FERROELECTRICS | 1997年 / 15卷 / 1-4期
关键词：
D O I：
10.1080/10584589708015693
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.
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页码：19 / 28
页数：10
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