Microelectronic Transducer for Heat-Power Engineering

被引：0
|
作者：
Lobach, Roman V. [1 ]
Lobach, Oleg V. [1 ]
Dikareva, Regina P. [1 ]
机构：
[1] Novosibirsk State Tech Univ, Novosibirsk, Russia
来源：
EDM 2008: INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, PROCEEDINGS | 2008年
关键词：
heat flux sensor; microsystem technology; MEMS; polysilicon;
D O I：
10.1109/SIBEDM.2008.4585871
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper is described of microsystem heat flux sensor principle of operation, is shown sensor construction and is presented its main parameters.
引用
收藏
页码：74 / 75
页数：2
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