Magnetron sputtered TiC/a:C nanocomposite thin films: Deposition parameters vs. properties

被引：8

作者：

Balazsi, Katalin ^{[1
]}

机构：

[1] Hungarian Acad Sci, Inst Tech Phys & Mat Sci, Thin Film Phys Dept, Energy Res Ctr, Konkoly Thege M Str 29-33, H-1121 Budapest, Hungary

来源：

VACUUM | 2019年 / 164卷

关键词：

TiC/a:C; Nanocomposite; Hardness; Structure; MECHANICAL-PROPERTIES; COATINGS; TITANIUM; CARBON; DC;

D O I：

10.1016/j.vacuum.2019.03.012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Titanium carbide/amorphous carbon (TiC/a:C) thin films have been extensively investigated in the past due to their wide applications in technology and industry. One of the most used preparation methods is a magnetron sputtering which provides a great flexibility and possibility for preparation of thin films with various structures. In this work, the effect of deposition temperature and Ti content on structure and mechanical properties of sputtered TiC/a:C coatings was studied. In the case of films with fully bounded Ti ions and columnar structure, the best mechanical properties were found. These films may be used as passivation layers for different applications because of their extremelly chemical stability and excellent mechanical properties.

引用

页码：121 / 125

页数：5

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