Laser induced damage/ablation morphology on the 8(Al/Ti)/Si system in different ambient conditions

被引：8

作者：

Petrovic, S. M. ^{[1
]}

Perusko, D. ^{[1
]}

Salatic, B. ^{[2
]}

Bogdanovic-Radovic, I. ^{[3
]}

Panjan, P. ^{[4
]}

Gakovic, B. ^{[1
]}

Pantelic, D. ^{[2
]}

Trtica, M. ^{[1
]}

Jelenkovic, B. ^{[2
]}

机构：

[1] Univ Belgrade, Inst Nucl Sci Vinca, Belgrade 11001, Serbia

[2] Univ Belgrade, Inst Phys Belgrade, Belgrade 11080, Serbia

[3] Rudjer Boskovic Inst, Zagreb 10002, Croatia

[4] Jozef Stefan Inst, Ljubljana 1000, Slovenia

来源：

OPTICS AND LASER TECHNOLOGY | 2013年 / 54卷

关键词：

Al/Ti nanolayered thin film; Laser ablation; Inter-mixing; TITANIUM; FILMS; NANOPARTICLES; STABILITY; ABLATION; TI;

D O I：

10.1016/j.optlastec.2013.04.030

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A study of morphological and composition changes of the (8(Al/Ti)/Si) system induced by laser pulses in different ambient conditions is presented. The effects of an Er, Yb, Cr-Glass laser, operating at 1540 nm wavelength with pulse duration of 44 ns, on a complex target were investigated. Irradiation of 8(Al/Ti)/Si was carried out at intensities of 5.9 and 9.5 x 10(11) W m(-2) in air, water and ethanol. The laser-induced morphological and composition modifications have shown dependence on applied intensities, number of laser pulses and ambient conditions. The following morphological changes were observed: (i) intense surface melting of the thin film and Si-substrate; (ii) ablation/exfoliation of the 8(Al/Ti) multilayer thin film from Si, (iii) appearance of hydrodynamic features such as resolidified material, and (iv) formation of crater at multi-pulse action. The formation of parallel periodic surface structure was only occurring in single pulse air-assisted modification. Analysis of the composition revealed that laser modification induced intermixing between the components of individual Al and Ti layers with potential formation of AlTi intermetallic compounds. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：22 / 29

页数：8

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