Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes

被引：92

作者：

Li, Xiangming ^{[1
]}

Ding, Yucheng ^{[1
]}

Shao, Jinyou ^{[1
]}

Tian, Hongmiao ^{[1
]}

Liu, Hongzhong ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

来源：

ADVANCED MATERIALS | 2012年 / 24卷 / 23期

关键词：

electrohydrodynamic deformation; microlens arrays; microhole templates; micromolding; micromirror arrays; LENS;

D O I：

10.1002/adma.201104625

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：OP165 / OP169

页数：5

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