Macro-micro Driven Ultra-Precision Positioning Stage for Conventional Grinder

被引：0

作者：

Zhang, Jialiang ^{[1
]}

Li, Beizhi ^{[1
]}

Xu, Yuan ^{[1
]}

Yang, Jianguo ^{[1
]}

机构：

[1] Donghua Univ, Coll Mech Engn, Shanghai 201620, Peoples R China

来源：

INTELLIGENT ROBOTICS AND APPLICATIONS, PT II, PROCEEDINGS | 2008年 / 5315卷

关键词：

Macro-micro driven; precision grinder; micro feed; piezoelectric actuator; flexible hinge;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Precision positioning stage is the key part of precision feed system of a machine. To compensate for the effect of processing precision affected by the vibration of wheelhead of precision grinder, a micro-feed worktable using piezoelectric actuators, which serves as an auxiliary feeding device, has been introduced for common cylindrical grinders. The stiffness of its support-oriented mechanism is modeled and analyzed by PRO/E and FEA. A close-loop control system based on special algorithm is presented and the prototype of a macro-micro driven ultra-precision positioning stage on grinder is developed. The experimental results show that the positioning accuracy of the stage is 0.1 +/- 0.02 mu m, its average stiffness is 207 N/mu m and the cylindricity of machined parts is less than 2 mu m.

引用

页码：848 / 857

页数：10