Plasma diagnostics in pulsed laser deposition of GaLaS chalcogenides

被引：18

作者：

Pompilian, O. G. ^{[1
]}

Gurlui, S. ^{[2
]}

Nemec, P. ^{[3
]}

Nazabal, V. ^{[4
]}

Ziskind, M. ^{[1
]}

Focsa, C. ^{[1
]}

机构：

[1] Univ Lille 1, UMR 8523, Lab Phys Lasers Atomes & Mol, F-59655 Villeneuve Dascq, France

[2] Alexandru Ioan Cuza Univ, Dept Phys, Iasi 700506, Romania

[3] Univ Pardubice, Fac Chem Technol, Pardubice 53210, Czech Republic

[4] Univ Rennes 1, Lab Verres & Ceram, F-35042 Rennes, France

来源：

APPLIED SURFACE SCIENCE | 2013年 / 278卷

关键词：

Pulsed laser deposition; Plasma dynamics; Optical emission spectroscopy; Chalcogenides; ABLATION; GLASSES; DESORPTION;

D O I：

10.1016/j.apsusc.2012.11.069

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The aim of this work is to characterize the ejection plume obtained by laser ablation of GaLaS (GLS) samples in order to better understand the ablation phenomena for optimizing the pulsed laser deposition of chalcogenide thin films. The dynamics of the plasma between target and substrate was investigated through time-and space-resolved optical emission spectroscopy. High-resolution optical spectra have been recorded in the UV-VIS range using a 500-mm focal length monochromator and a fast gate ICCD camera. From the space-time evolution of the optical signals, the velocities of various species (including neutrals and ions) have been derived. Using the relative intensity method, the space-and time-evolution of the excitation temperature and electronic density have been determined. A complex behavior of the laser ablation plasma has been revealed. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：352 / 356

页数：5

共 50 条

[31] Plasma plume dynamics in magnetically assisted pulsed laser deposition
Haverkamp, J. D.
Bourham, M. A.
Du, S.
Narayan, J.
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (02)
[32] Characteristics of plasma shock waves in pulsed laser deposition process
Li, ZH
Zhang, DM
Yu, BM
Guan, L
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2004, 28 (02): : 205 - 211
[33] Plasma assisted pulsed laser deposition of hydroxylapatite thin films
Solla, EL
Borrajo, JP
González, P
Serra, J
Liste, S
Chiussi, S
León, B
Pérez-Amor, M
APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 360 - 364
[34] PULSED PLASMA FLOW DIAGNOSTICS
Tazhen, A. B.
Dosbolayev, M. K.
Ramazanov, T. S.
RECENT CONTRIBUTIONS TO PHYSICS, 2022, 81 (02): : 35 - 39
[35] Pulsed laser deposition of boron carbide: Spectroscopic study of the laser ablation plasma
Derkach, O
Pentzien, S
Kautek, W
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING II, 1997, 2991 : 48 - 58
[36] LASER-INDUCED PLASMA FORMATION DURING PULSED-LASER DEPOSITION
ADEN, M
KREUTZ, EW
VOSS, A
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (10) : 1545 - 1553
[37] Pulsed laser deposition
D. Bäuerle
R. Rössler
J. Pedarnig
S.H. Yun
R. Dinu
N. Arnold
Applied Physics A, 1999, 69 (Suppl 1) : S45 - S48
[38] PULSED LASER DEPOSITION
HUBLER, GK
MRS BULLETIN, 1992, 17 (02) : 26 - 27
[39] Plasma diagnostics during pulsed laser deposition of diamond-like carbon using single crystal graphite and amorphous carbon
Yamagata, Y
Sharma, A
Narayan, J
Mayo, RM
Newman, JW
Ebihara, K
AMORPHOUS AND NANOSTRUCTURED CARBON, 2000, 593 : 255 - 260
[40] Plasma diagnostics in KrF excimer laser deposition of Ti thin films
Hong, MH
Lu, YF
Ho, TM
Lu, LW
Low, TS
LASER PROCESSING OF MATERIALS AND INDUSTRIAL APPLICATIONS II, 1998, 3550 : 441 - 449

← 1 2 3 4 5 →