Plasma diagnostics in pulsed laser deposition of GaLaS chalcogenides

被引：18

作者：

Pompilian, O. G. ^{[1
]}

Gurlui, S. ^{[2
]}

Nemec, P. ^{[3
]}

Nazabal, V. ^{[4
]}

Ziskind, M. ^{[1
]}

Focsa, C. ^{[1
]}

机构：

[1] Univ Lille 1, UMR 8523, Lab Phys Lasers Atomes & Mol, F-59655 Villeneuve Dascq, France

[2] Alexandru Ioan Cuza Univ, Dept Phys, Iasi 700506, Romania

[3] Univ Pardubice, Fac Chem Technol, Pardubice 53210, Czech Republic

[4] Univ Rennes 1, Lab Verres & Ceram, F-35042 Rennes, France

来源：

APPLIED SURFACE SCIENCE | 2013年 / 278卷

关键词：

Pulsed laser deposition; Plasma dynamics; Optical emission spectroscopy; Chalcogenides; ABLATION; GLASSES; DESORPTION;

D O I：

10.1016/j.apsusc.2012.11.069

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The aim of this work is to characterize the ejection plume obtained by laser ablation of GaLaS (GLS) samples in order to better understand the ablation phenomena for optimizing the pulsed laser deposition of chalcogenide thin films. The dynamics of the plasma between target and substrate was investigated through time-and space-resolved optical emission spectroscopy. High-resolution optical spectra have been recorded in the UV-VIS range using a 500-mm focal length monochromator and a fast gate ICCD camera. From the space-time evolution of the optical signals, the velocities of various species (including neutrals and ions) have been derived. Using the relative intensity method, the space-and time-evolution of the excitation temperature and electronic density have been determined. A complex behavior of the laser ablation plasma has been revealed. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：352 / 356

页数：5

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