Pulsed laser deposition of conductive indium tin oxide thin films

被引：11

作者：

Petukhov, I. A. ^{[1
]}

Shatokhin, A. N. ^{[1
]}

Putilin, F. N. ^{[1
]}

Rumyantseva, M. N. ^{[1
]}

Kozlovskii, V. F. ^{[1
]}

Gaskov, A. M. ^{[1
]}

Zuev, D. A. ^{[2
]}

Lotin, A. A. ^{[2
]}

Novodvorsky, O. A. ^{[2
]}

Khramova, A. D. ^{[2
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Chem, Moscow 119991, Russia

[2] Russian Acad Sci, Inst Laser & Informat Technol, Shatura 140700, Moscow Oblast, Russia

来源：

INORGANIC MATERIALS | 2012年 / 48卷 / 10期

关键词：

ITO; PROPERTY; GROWTH;

D O I：

10.1134/S0020168512100068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin indium tin oxide (ITO) films have been grown on quartz glass substrates by pulsed laser deposition. The influence of ablation target composition and deposition conditions on the growth rate, optical transmission spectra, and carrier mobility and concentration of the films has been examined. The average surface roughness of the ITO films grown at substrate temperatures above 300A degrees C is 2 nm. The films grown at an oxygen partial pressure of 5 mTorr using ablation targets with Sn/(In + Sn) = 5% possess high transmission (85-95%) in the visible range and low resistivity (1.8 x 10(-4) Omega cm).

引用

页码：1020 / 1025

页数：6

共 25 条

[1] Isotype bifacial silicon solar cells obtained by ITO spray pyrolysis [J].

Bruk, L. ;

Fedorov, V. ;

Sherban, D. ;

Simashkevich, A. ;

Usatii, I. ;

Bobeico, E. ;

Morvillo, P. .

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 159-60 :282-285

[2] Layers of CdTe and CdS obtained by PLD on ITO substrates [J].

Bylica, A. ;

Sagan, P. ;

Virt, I. ;

Bester, A. ;

Stefaniuk, I. ;

Kuzma, M. .

THIN SOLID FILMS, 2006, 511 :439-442

[3] Characterization of indium tin oxide (ITO) thin films prepared by a sol-gel spin coating process [J].

Cho, Hyun ;

Yun, Young-Hoon .

CERAMICS INTERNATIONAL, 2011, 37 (02) :615-619

[4] Structural investigations of ITO-ZnO films grown by the combinatorial pulsed laser deposition technique [J].

Craciun, Doina ;

Socol, Gabriel ;

Stefan, Nicolaie ;

Miroiu, Marimona ;

Mihailescu, Ion N. ;

Galca, Aurelian-Catalin ;

Craciun, Valentin .

APPLIED SURFACE SCIENCE, 2009, 255 (10) :5288-5291

[5]

Eason R., 2007, APPL LED GROWTH FUNC, P223

[6] Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis [J].

El Rhaleb, H ;

Benamar, E ;

Rami, M ;

Roger, JP ;

Hakam, A ;

Ennaoui, A .

APPLIED SURFACE SCIENCE, 2002, 201 (1-4) :138-145

[7] Optical properties of ITO/TiO2 single and double layer thin films deposited by RPLAD [J].

Fotsa-Ngaffo, Fernande ;

Caricato, Anna Paola ;

Romano, Francesco .

APPLIED SURFACE SCIENCE, 2009, 255 (24) :9684-9687

[8]

Ginley D. S., 2010, HDB TRANSPARENT COND, P154

[9] Microstructure-Property relationships in thin film ITO [J].

Giusti, G. ;

Tian, L. ;

Jones, I. P. ;

Abell, J. S. ;

Bowen, J. .

THIN SOLID FILMS, 2009, 518 (04) :1140-1144

[10]

Herrera M, 2002, REV MEX FIS, V48, P61

← 1 2 3 →