Iron doped InGaAs: Competitive THz emitters and detectors fabricated from the same photoconductor

被引:84
作者
Globisch, B. [1 ]
Dietz, R. J. B. [1 ]
Kohlhaas, R. B. [1 ]
Goebel, T. [1 ]
Schell, M. [1 ]
Alcer, D. [2 ]
Semtsiv, M. [2 ]
Masselink, W. T. [2 ]
机构
[1] Fraunhofer Inst Telecommun, Heinrich Hertz Inst, Einsteinufer 37, D-10587 Berlin, Germany
[2] Humboldt Univ, Dept Phys, D-12489 Berlin, Germany
关键词
TERAHERTZ POWER MEASUREMENT; TIME-DOMAIN SPECTROMETER; TEMPERATURE-GROWN GAAS; FE ACCEPTOR LEVEL; DYNAMIC-RANGE; GENERATION; ANTENNAS; CARRIER; IN0.53GA0.47AS; SEMICONDUCTORS;
D O I
10.1063/1.4975039
中图分类号
O59 [应用物理学];
学科分类号
摘要
Today, the optimum material systems for photoconductive emitters and receivers are different. In THz reflection measurements, this leads to complicated optics or performance compromises. We present photoconductive emitters and detectors fabricated from molecular beam epitaxy (MBE) grown iron (Fe) doped InGaAs, which are well suited for a THz time-domain spectroscopy as both emitters and detectors. As a photoconductive emitter, 75 mu W +/- 5 mu W of radiated THz power was measured. As a detector, THz pulses with a bandwidth of up to 6 THz and a peak dynamic range of 95 dB could be detected. These results are comparable to state-of-the-art THz photoconductors, which allows for simple reflection measurements without a performance decrease. The incorporation of Fe in InGaAs during MBE growth is investigated by secondary ion mass spectroscopy, Hall, and transient differential transmission measurements. Growth temperatures close to 400 degrees C allow for homogeneous Fe doping concentrations up to 5 x 10(20) cm(-3) and result in a photoconductor with an electron lifetime of 0.3 ps, a resistivity of 2 k Omega cm, and an electron mobility higher than 900 cm(2) V-1 s(-1). We show that iron dopants are incorporated up to a maximum concentration of 1 x 10(17) cm(-3) into substitutional lattice sites. The remaining dopants are electrically inactive and form defects that are anneal-stable up to a temperature of 600 degrees C. The fast recombination center in Fe-doped InGaAs is an unidentified defect, representing approximate to 0.5% of the nominal iron concentration. The electron and hole capture cross section of this defect is determined as sigma(e) = 3.8 x 10(-14) cm(2) and sigma(h) = 5.5 x 10(-15) cm(2), respectively. Published by AIP Publishing.
引用
收藏
页数:12
相关论文
共 43 条
[1]  
Benjamin SD, 1996, APPL PHYS LETT, V68, P2544, DOI 10.1063/1.116178
[2]  
Bourgoin J., 1983, Point defects in semiconductors
[3]   Simulation of fluence-dependent photocurrent in terahertz photoconductive receivers [J].
Castro-Camus, E. ;
Johnston, M. B. ;
Lloyd-Hughes, J. .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2012, 27 (11)
[4]   OPTICAL AND ELECTRICAL CHARACTERIZATION OF HIGH-RESISTIVITY LIQUID-PHASE-EPITAXIAL IN0.53GA0.47AS-FE [J].
CHEN, Z ;
WOLF, T ;
KORB, W ;
BIMBERG, D .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (09) :4574-4579
[5]   Influence and adjustment of carrier lifetimes in InGaAs/InAlAs photoconductive pulsed terahertz detectors: 6 THz bandwidth and 90dB dynamic range [J].
Dietz, Roman J. B. ;
Globisch, Bjoern ;
Roehle, Helmut ;
Stanze, Dennis ;
Goebel, Thorsten ;
Schell, Martin .
OPTICS EXPRESS, 2014, 22 (16) :19411-19422
[6]   64 μW pulsed terahertz emission from growth optimized InGaAs/InAlAs heterostructures with separated photoconductive and trapping regions [J].
Dietz, Roman J. B. ;
Globisch, Bjoern ;
Gerhard, Marina ;
Velauthapillai, Ajanthkrishna ;
Stanze, Dennis ;
Roehle, Helmut ;
Koch, Martin ;
Goebel, Thorsten ;
Schell, Martin .
APPLIED PHYSICS LETTERS, 2013, 103 (06)
[7]   Analytical modeling and optimization of terahertz time-domain spectroscopy experiments using photoswitches as antennas [J].
Duvillaret, L ;
Garet, F ;
Roux, JF ;
Coutaz, JL .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2001, 7 (04) :615-623
[8]   290 fs switching time of Fe-doped quantum well saturable absorbers in a microcavity in 1.55 μm range [J].
Gicquel-Guézo, M ;
Loualiche, S ;
Even, J ;
Labbé, C ;
Dehaese, O ;
Le Corre, A ;
Folliot, H ;
Pellan, Y .
APPLIED PHYSICS LETTERS, 2004, 85 (24) :5926-5928
[9]   Carrier dynamics in Beryllium doped low-temperature-grown InGaAs/InAlAs [J].
Globisch, B. ;
Dietz, R. J. B. ;
Stanze, D. ;
Goebel, T. ;
Schell, M. .
APPLIED PHYSICS LETTERS, 2014, 104 (17)
[10]   Absolute terahertz power measurement of a time-domain spectroscopy system [J].
Globisch, Bjoern ;
Dietz, Roman J. B. ;
Goebel, Thorsten ;
Schell, Martin ;
Bohmeyer, Werner ;
Mueller, Ralf ;
Steiger, Andreas .
OPTICS LETTERS, 2015, 40 (15) :3544-3547