Monte Carlo simulation of electron kinetics in a hollow cathode discharge

被引:1
作者
Karatodorov, S. [1 ]
Mihailova, D. [2 ]
van Dijk, J. [2 ]
van der Mullen, J. [2 ]
Grozeva, M. [1 ]
机构
[1] Bulgarian Acad Sci, Georgi Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee, BU-1784 Sofia, Bulgaria
[2] Eindhoven Univ Technol, Dept Appl Phys, NL-25612 Eindhoven, Netherlands
来源
17TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON, AND ION TECHNOLOGIES (VEIT 2011) | 2012年 / 356卷
关键词
GLOW-DISCHARGE;
D O I
10.1088/1742-6596/356/1/012043
中图分类号
O59 [应用物理学];
学科分类号
摘要
A kinetic model is reported computing the electron behavior in a hollow cathode discharge based on the Monte Carlo technique. It is a part of the PLASIMO modelling toolkit. The model allows the electrons to be closely followed while they travel and undergo collisions in the discharge. The Monte Carlo module was applied to the case of a HCD used as an excitation medium of atoms obtained by laser ablation. Results are obtained on the electron energy distribution function and the mean electron energy under typical discharge conditions. The output data and future development of the model and its applications are analyzed and discussed.
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页数:4
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