Environmental challenges in nanoelectronics manufacturing

被引：5

作者：

Shadman, Farhang ^{[1
]}

机构：

[1] Univ Arizona, SRC Engn Res Ctr, Tucson, AZ 85721 USA

来源：

CURRENT OPINION IN CHEMICAL ENGINEERING | 2012年 / 1卷 / 03期

关键词：

ZIRCONIUM-OXIDE; NANOPARTICLES; NANOMATERIALS; HEALTH; MICRO;

D O I：

10.1016/j.coche.2012.03.004

中图分类号：

Q81 [生物工程学（生物技术）]; Q93 [微生物学];

学科分类号：

071005 ; 0836 ; 090102 ; 100705 ;

摘要：

Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.

引用

页码：258 / 268

页数：11

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