High-performance thin film transistors based on amorphous Al-N co-doped InZnO films prepared by RF magnetron sputtering

In this study, we developed bottom-gate thin film transistors (TFTs) using a novel amorphous Al-N co-doped InZnO thin film as an active layer and determined their electrical characteristics. The film achieved high transmittance in the visible region, and X-ray diffraction pattern confirmed the thin film's amorphous nature. Scanning electron microscopy and atom force microscopy images revealed a thin film with a smooth and uniform surface and a low root mean square roughness. X-ray photoelectron spectroscopy confirmed that oxygen vacancies in the thin film increased after annealing. Moreover, the obtained TFT showed a saturation mobility of 31.8cm(2) V-1 s(-1), a threshold voltage of 7.0V, a subthreshold swing of 0.6V/decade, and an on/off current ratio of 9.7 x 10(8).