Enabling monolithic 3D image sensor using large-area monolayer transition metal dichalcogenide and logic/memory hybrid 3D+IC

A monolithic 3D image sensor is demonstrated by sequentially fabricating large-area (> 2cmx2cm) monolayer (<1nm) transition metal dichalcogenide (TMD) phototransistor array on top of a 3D logic/memory hybrid 3D(+)IC connected by high density interconnect. The photocurrent of the monolayer MoS2 phototransistor shows a linear response to the incident laser power density and exhibits high responsivity (>20A/W). The bottom 3D stackable poly-Si nanowire FET, fabricated by low thermal budget process (T-sub< 400 degrees C), represents steep subthreshold swing (< 120mV/dec.) and high driving current (> 200uA/um). The low driving voltage 6T SRAM shows a static noise margin (SNM) of 150 mV at V-DD= 0.5V. Such integration of large-area monolayer TMD phototransistor array on logic/memory hybrid 3D(+)IC enables the low power and low cost monolithic 3D image sensor.