Scalable and Direct Growth of Graphene Micro Ribbons on Dielectric Substrates

被引:53
作者
Wang, Debin [1 ,2 ]
Tian, He [1 ,2 ,3 ,4 ]
Yang, Yi [3 ,4 ]
Xie, Dan [3 ,4 ]
Ren, Tian-Ling [3 ,4 ]
Zhang, Yuegang [1 ,2 ,5 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
[3] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[4] Tsinghua Univ, TNList, Beijing 100084, Peoples R China
[5] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China
关键词
LARGE-AREA; BILAYER GRAPHENE; HIGH-QUALITY; FILMS; TEMPERATURE; OXIDE; TRANSPARENT; NANORIBBONS; FABRICATION; LAYERS;
D O I
10.1038/srep01348
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Here we report on a scalable and direct growth of graphene micro ribbons on SiO2 dielectric substrates using a low temperature chemical vapor deposition. Due to the fast annealing at low temperature and dewetting of Ni, continuous few-layer graphene micro ribbons grow directly on bare dielectric substrates through Ni assisted catalytic decomposition of hydrocarbon precursors. These high quality graphene micro ribbons exhibit low sheet resistance of similar to 700 Omega - 2100 Omega, high on/off current ratio of similar to 3, and high carrier mobility of similar to 655 cm(2)V(-1)s(-1) at room temperature, all of which have shown significant improvement over other lithography patterned CVD graphene micro ribbons. This direct approach can in principle form graphene ribbons of any arbitrary sizes and geometries. It allows for a feasible methodology towards better integration with semiconductor materials for interconnect electronics and scalable production for graphene based electronic and optoelectronic applications where the electrical gating is the key enabling factor.
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页数:7
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