Design and Analysis for the Hybrid Capacitance and Micro-leverage Amplifier Actuator

被引：0

作者：

Liu Fengli ^{[1
]}

Hao Yongping ^{[1
]}

机构：

[1] Shenyang Li Gong Univ, R&D Ctr CAD CAM Technol, Shenyang, Peoples R China

来源：

MATERIALS SCIENCE AND INFORMATION TECHNOLOGY, PTS 1-8 | 2012年 / 433-440卷

关键词：

component; MEMS; hybrid; micro-lever; actuator;

D O I：

10.4028/www.scientific.net/AMR.433-440.2827

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

This new hybrid capacitance and micro-leverage amplifier actuator was based on modifying existing structure and mechanism. That overcame the drawback of small displacement of the capacitance actuator in virtual of the micro-leverage amplifier. The amplifier time of the single micro-leverage amplifier was 4.5. Connect the 1x9 array with nine electrostatic capacitance micro-actuators with the amplifier and form a polymer actuator. The actuator whole size was limited to 4x4 mm, the maximum output displacement was 42 mu m under 15V voltage input. The pull-in voltage of the actuator array was 19V.

引用

页码：2827 / 2830

页数：4