Soft magnetic property and high-frequency permeability of [Fe80Ni20-O/TiO2]n multilayer thin films

被引：19

作者：

Geng, H. ^{[1
]}

Wei, J. Q. ^{[1
]}

Wang, Z. W. ^{[1
]}

Nie, S. J. ^{[1
]}

Guo, H. Z. ^{[1
]}

Wang, L. S. ^{[1
]}

Chen, Y. ^{[1
]}

Yue, G. H. ^{[1
]}

Peng, D. L. ^{[1
]}

机构：

[1] Xiamen Univ, Coll Mat, Dept Mat Sci & Engn, Xiamen 361005, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2013年 / 576卷

基金：

中国国家自然科学基金;

关键词：

Multilayer thin films; Magnetic anisotropy; High-frequency permeability; Magnetron sputtering;

D O I：

10.1016/j.jallcom.2013.04.128

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Multilayer thin films with excellent magnetic property and high-frequency permeability possess a significant position in electromagnetic miniaturization devices applied in GHz range. In this work, by controlling the alternately magnetron sputtering time at room temperature, we fabricated [Fe80Ni20-O/TiO2](n) multilayer thin films with different TiO2 interlayer thicknesses (t = 0.25-4 nm) and fixed Fe80Ni20-O layer thickness without applying inducing magnetic field. The static and dynamic magnetic properties of these films were investigated and evident in-plane uniaxial magnetic anisotropy field can be adjusted in a broad range only by changing the thickness of the TiO2 interlayer. When the t increases gradually from 0.25 to 4 nm, the resistivity and in-plane uniaxial magnetic anisotropy field increase monotonically. In particular, by controlling the thickness of each TiO2 interlayer to an optimized value, good soft magnetic property and high-frequency performances in GHz range have been observed. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：13 / 17

页数：5

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