Computer-aided interferometer for testing microdisplacement of piezoelectric ceramics

被引：0

作者：

Zhu, Y ^{[1
]}

Chen, JB ^{[1
]}

Wang, Q ^{[1
]}

Chen, L ^{[1
]}

Zhu, RH ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Electroopt, Nanjing 210094, Peoples R China

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 1999年 / 22卷 / 01期

关键词：

contact-type interferometer; computer-aided interferometry; piezoelectric ceramics;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes a kind of computer-aided contact-type interferometer for testing the microdisplacement of piezoelectric ceramics (PZT). Its accuracy is better than 0.01 mu m. A data acquisition system, including a CCD, grabber, etc., has been used to detect and digitize interferograms. This system analyzes a two-dimensional interferogram automatically and quickly, while both calibrate with monochromatic fringes and test with achromatic fringes. Software has been used to analyze the two-dimensional interferogram and to rest the nonlinearity and hysteresis of PZT. (C) 1999 John Wiley & Sons, Inc.

引用

页码：72 / 74

页数：3