Laser Scanner-Stage Synchronization Method for High-Speed And Wide-Area Fabrication

被引：8

作者：

Kim, Kyunghan ^{[1
]}

Yoon, Kwangho ^{[1
]}

Suh, Jeong ^{[1
]}

Lee, Jaehoon ^{[1
]}

机构：

[1] Korea Inst Machinery & Mat, Dept High Dens Energy Beam Proc & Syst, Taejon 305343, South Korea

来源：

JOURNAL OF LASER MICRO NANOENGINEERING | 2012年 / 7卷 / 02期

关键词：

Laser; Galvanometer scanner; Linear stage; On-the-fly; Synchronization;

D O I：

10.2961/jlmn.2012.02.0018

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents an on-the-fly method to synchronize a laser galvanometer scanner and linear stage for fast and wide-area fabrication. The location and velocity information of the linear stage is transferred to the galvanometer scanner control board by an encoder signal. The scanner control board calculates the amount of laser beam movement by subtracting from original CAD data to linear stage movement. The on-the-fly method is different from the existing step and scanning method in that it ensures continuous stage movement and real-time signal transfer between the linear stage and galvanometer scanner.

引用

页码：231 / 235

页数：5