Six-beam homodyne laser Doppler vibrometry based on silicon photonics technology

被引:31
作者
Li, Yanlu [1 ,2 ]
Zhu, Jinghao [1 ,2 ]
Duperron, Matthieu [3 ]
O'Brien, Peter [3 ]
Schueler, Ralf [4 ]
Aasmul, Soren [5 ]
De Melis, Mirko [5 ]
Kersemans, Mathias [6 ]
Baets, Roel [1 ,2 ]
机构
[1] Univ Ghent, IMEC, Photon Res Grp, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium
[2] Univ Ghent, Ctr Nano & Biophoton, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium
[3] Tyndall Natl Inst, Photon Packaging Grp, Lee Maltings Complex Dyke Parade, Cork T12R5CP, Ireland
[4] SIOS Messtech GmbH, Vogelherd 46, D-98693 Ilmenau, Germany
[5] Medtron Bakken Res Ctr, Endepolsdomein 5, NL-6229 GW Maastricht, Netherlands
[6] Univ Ghent, Dept Mat Text & Chem Engn, Technol Pk Zwijnaarde 903, B-9052 Ghent, Belgium
关键词
PULSE-WAVE VELOCITY; ON-INSULATOR;
D O I
10.1364/OE.26.003638
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper describes an integrated six-beam homodyne laser Doppler vibrometry (LDV) system based on a silicon-on-insulator (SOI) full platform technology, with on-chip photo-diodes and phase modulators. Electronics and optics are also implemented around the integrated photonic circuit (PIC) to enable a simultaneous six-beam measurement. Measurement of a propagating guided elastic wave in an aluminum plate (speed approximate to 909 m/s @ 61.5 kHz) is demonstrated. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:3638 / 3645
页数:8
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