ZnO thin films deposition by spray pyrolysis: Influence of precursor solution properties

被引:139
作者
Lehraki, N. [2 ]
Aida, M. S. [1 ]
Abed, S. [1 ]
Attaf, N. [1 ]
Attaf, A. [2 ]
Poulain, M. [3 ]
机构
[1] Univ Constantine, Lab Couches Minces & Interfaces, Fac Sci, Constantine 25000, Algeria
[2] Univ Biskra, Lab Mat Semicond & Metall, Dept Phys, Biskra, Algeria
[3] Univ Rennes 1, Photon Mat Lab, F-35014 Rennes, France
关键词
Zinc oxide; Spray pyrolisis; Coatings; Thin films; ELECTRICAL-PROPERTIES; PHYSICAL-PROPERTIES; CHEMICAL SPRAY; GROWTH; TRANSPARENT; SOLIDIFICATION; TEMPERATURE; IMPACT;
D O I
10.1016/j.cap.2012.03.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Zinc oxide (ZnO) thin films were deposited by spray pyrolysis technique using different precursors. Three starting solutions salts namely: zinc acetate, zinc chloride and zinc nitrate were used. The properties of these solutions and their influence upon ZnO films growth rate are investigated. The obtained results indicate that the dissociation energy of the starting solution plays an important role on films growth rate. A linear relationship between the solution dissociation energy and the growth rate activation energy was found. However, the surface tension of the used solution controls the droplet shape impact. Both solution surface tension and dissociation enthalpy alter the microstructure of the formed film. Films deposited with zinc acetate are characterized by a smooth surface, dense network and high transparency, while films deposited with zinc chloride have a better crystallinity and low optical transmittance. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:1283 / 1287
页数:5
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