Scalable fabrication of high-performance and flexible graphene strain sensors

被引:373
作者
Tian, He [1 ,2 ]
Shu, Yi [1 ,2 ]
Cui, Ya-Long [1 ,2 ]
Mi, Wen-Tian [1 ,2 ]
Yang, Yi [1 ,2 ]
Xie, Dan [1 ,2 ]
Ren, Tian-Ling [1 ,2 ]
机构
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol TNList, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
FILMS; DEVICES;
D O I
10.1039/c3nr04521h
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Graphene strain sensors have promising prospects of applications in detecting human motion. However, the shortage of graphene growth and patterning techniques has become a challenging issue hindering the application of graphene strain sensors. Therefore, we propose wafer-scale flexible strain sensors with high-performance, which can be fabricated in one-step laser scribing. The graphene films could be obtained by directly reducing graphene oxide film in a Light-Scribe DVD burner. The gauge factor (GF) of the graphene strain sensor (10 mm x 10 mm square) is 0.11. In order to enhance the GF further, graphene micro-ribbons (20 mu m width, 0.6 mm long) has been used as strain sensors, of which the GF is up to 9.49. The devices may conform to various application requirements, such as high GF for low-strain applications and low GF for high deformation applications. The work indicates that laser scribed flexible graphene strain sensors could be widely used in medical-sensing, bio-sensing, artificial skin and many other areas.
引用
收藏
页码:699 / 705
页数:7
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