Analysis of impurities with inhomogeneous distribution in multicrystalline solar cell silicon by glow discharge mass spectrometry

被引:20
作者
Modanese, C. [1 ]
Arnberg, L. [1 ]
Di Sabatino, M. [1 ]
机构
[1] Norwegian Univ Sci & Technol NTNU, Dept Mat Sci & Engn, N-7491 Trondheim, Norway
来源
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2014年 / 180卷
关键词
Glow discharge mass spectrometry (GDMS); Trace elements; Multicrystalline silicon; Extended defects; Bulk analysis; METAL IMPURITIES;
D O I
10.1016/j.mseb.2013.10.010
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Multicrystalline silicon for solar cells presents material inhomogeneities related to the presence of extended defects such as grain boundaries or dislocations. These defects are possible sources for nucleation of precipitates, which generally show a highly inhomogeneous distribution in the crystal structure. The use of direct current (dc), continuous operation glow discharge mass spectrometry (GDMS) as an analytical technique to study these distributions is presented in this article, with focus on ultra-trace elements such as Fe and Cu. In order to evaluate the impact of the analytical parameters, a doping element (B) is also analyzed, since it generally shows a more homogeneous distribution in the crystal structure. The results suggest that, for commonly used mc-Si for solar cells, due to the size of the precipitates and the high degree of inhomogeneity in the bulk, single precipitates cannot be detected during common bulk analysis by dc GDMS. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:27 / 32
页数:6
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