Stochastic Modeling of the Impact of Random Dopants on Hot-Carrier Degradation in n-FinFETs

Using the deterministic version of our hotcarrier degradation (HCD) model, we perform a statistical analysis of the impact of random dopants (RDs) on the HCD in n-FinFETs. For this, we use an ensemble of 200 transistors with different configurations of RDs. Our analysis shows that changes in the linear drain currents have broad distributions, thereby resulting in broad distributions of device lifetimes. While lifetimes are nearly normally distributed at high stress biases, under voltages close to the operating regime, the distribution has a substantially different shape. This observation considerably complicates extrapolation from accelerated stress conditions, thereby suggesting that a comprehensive statistical treatment of the impact of RDs is required.