Analyses of laser and furnace treated sol-gel coatings

被引：0

作者：

De Hosson, JT ^{[1
]}

De Haas, M ^{[1
]}

机构：

[1] Univ Groningen, Ctr Mat Sci, Dept Appl Phys, NL-9747 AG Groningen, Netherlands

来源：

SURFACE MODIFICATION TECHNOLOGIES XI | 1998年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Here we explore a new method that allows thin films to be made with almost any composition and degree of porosity by means of a combination of sol-gel and laser technology. Results are presented for furnace and laser treated TEOTI-(tetraethylorthotitanate as sol precursor) coated silicon samples. From detailed X-ray analyses it appeared that the TEOTi-derived sol-gel coatings experience crystallisation during furnace as well as laser treatment. The resulting TiO2 is present in two different tetragonal phases. As far as the residual stress measurements on the TEOTi derived sol-gel coatings are concerned it can be concluded that there is no significant tri-axial stress state present in the coating, which justifies the biaxial stress analysis.

引用

页码：805 / 813

页数：9