Selective-area growth of magnetic garnet crystals by liquid-phase epitaxy and its application to waveguide devices

被引:2
作者
Yokoi, H [1 ]
Mizumoto, T [1 ]
Takano, T [1 ]
机构
[1] Tokyo Inst Technol, Fac Engn, Dept Phys Elect, Meguro Ku, Tokyo 1528552, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 08期
关键词
selective-area growth; magnetic garnets; liquid-phase epitaxy; SEM; XRD; EDX; RHEED;
D O I
10.1143/JJAP.38.4847
中图分类号
O59 [应用物理学];
学科分类号
摘要
Magnetic garnet layers with the composition of (LuNdBi)(3)(FeAl)(5)O-12 have been grown on (III)-oriented Gd3Ga5O12 (GGG) substrates, which are patterned with stripes of different widths using a Ti mask, by liquid-phase epitaxy to fabricate one-step grown magnetic garnet waveguides. The garnet layers were investigated by scanning electron microscopy, X-ray diffraction measurements, energy-dispersive X-ray analysis and reflection high-energy electron diffraction. The layers grown on Ti-masked regions had a coarse and uneven surface, which is attributed to the damage in the surface of GGG substrates during the growth. The waveguiding experiment indicated that the light waves could be guided within the waveguide with a propagation loss of approximately 0.7 dB/mm.
引用
收藏
页码:4847 / 4851
页数:5
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