SnO2-nanowires grown by catalytic oxidation of tin sputtered thin films for formaldehyde detection

被引：54
作者：
Castro-Hurtado, I. [1 ]
Herran, J.
Ga Mandayo, G.
Castano, E.
机构：
[1] Univ Navarra, CEIT, San Sebastian 20018, Spain
来源：
THIN SOLID FILMS | 2012年 / 520卷 / 14期
关键词：
Tin oxide; Nanowire; VLS method; Formaldehyde; Gas sensor; GAS SENSOR; OXIDE NANOWIRES; NO2; SURFACE;
D O I：
10.1016/j.tsf.2011.10.140
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The aim of the present work is to test the sensing behaviour of tin dioxide nanowires, which have been grown directly onto a sensing device. This device consists in an alumina substrate provided with platinum interdigitated microelectrodes and a Pt heater on the reverse side. The nanowire growing process based on a vapour-liquid-solid method consists of three steps: deposition of a tin thin film by DC sputtering, a 5 nm-thick Au layer deposition and an annealing treatment in the presence of oxygen for the growth of the SnO2 nanowires. These samples have been tested under different concentrations of formaldehyde (HCHO), showing a high sensitivity and very short response and recovery times even at low operating temperatures (130 degrees C). (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：4792 / 4796
页数：5
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