Design, Analysis and Test for Micro-mechanical Piezoresistive Accelerometer

First of all, this paper analyzes the piezoresistive accelerometers' research achievements at home and abroad. Then, design, manufacturing and testing method of the accelerometer array is presented. According to the detection requirements of fuze's environmental forces, this paper provides an array accelerometers structure. In this way, each independent chip has 2*2 accelerometers, and every two accelerometers have the same structure sizes. So, the accelerometer array has two different measurement ranges. In order to reduce the influence of cross sensitivity, the accelerometer uses criss-cross beams. Every single accelerometer comprises sensing unit, signal processing circuit and self-test unit. According to the characteristics of processing plant, an entire series of independent processes for micro-mechanical piezoresistive fabrication is designed, and also given the layouts. The accelerometer is fabricated and its sensitivity and self-test performances are tested in this paper, finally this paper gives the reasons which cause test errors.