Simulation of an improved magnetic-electrostatic detector objective lens for LVSEM

被引：5

作者：

Knell, G ^{[1
]}

Plies, E ^{[1
]}

机构：

[1] Univ Tubingen, Inst Angew Phys, D-72076 Tubingen, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1999年 / 427卷 / 1-2期

关键词：

electron optics; design of lenses; combined magnetic-electrostatic lenses; simulation of electron optical properties; low-voltage scanning electron microscopy; SEM;

D O I：

10.1016/S0168-9002(98)01548-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The simulations of the imaging properties of several magnetic-electrostatic detector objective lenses are presented. We have assumed that the magnetic circuit has a radially arranged pole-piece gap. By using this snorkel lens design the specimen is immersed in a strong magnetic field. The calculations show that the chromatic aberration coefficient, which essentially determines the resolution in low-voltage scanning electron microscopy, only decreases with increasing immersion ratio if the radius of the inner pole piece is not too small. Furthermore we determined the collection efficiency of secondary electrons for a lens variant which is optimized with respect to primary electron optics. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：99 / 103

页数：5

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