Modification of graphene properties due to electron-beam irradiation

被引:405
|
作者
Teweldebrhan, D.
Balandin, A. A. [1 ]
机构
[1] Univ Calif Riverside, Nanodevice Lab, Dept Elect Engn, Riverside, CA 92521 USA
关键词
amorphisation; electron beam effects; focused ion beam technology; RESONANT RAMAN-SCATTERING; GRAPHITE; SPECTROSCOPY; SPECTRA; 1ST-ORDER; DAMAGE;
D O I
10.1063/1.3062851
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report micro-Raman investigation of changes in the single and bilayer graphene crystal lattice induced by the low and medium energy electron-beam irradiation (5-20 keV). It was found that the radiation exposures result in the appearance of the strong disorder D band around 1345 cm(-1), indicating damage to the lattice. The D and G peak evolution with increasing radiation dose follows the amorphization trajectory, which suggests graphene's transformation to the nanocrystalline and then to amorphous form. The results have important implications for graphene characterization and device fabrication, which rely on the electron microscopy and focused ion beam processing.
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页数:3
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