Improved pentacene growth continuity for enhancing the performance of pentacene-based organic thin-film transistors

This study proposes an alternative planar bottom-contact (pBC) structure to enhance the electrical performance of pentacene-based organic thin-film transistors (OTFTs). This pBC structure uses a bilayer dielectric to control planarization with a precise etch depth and introduces a bilayer photoresist lift-off method to ensure that planarization produces an optimum flatness. Because of the improved growth continuity of pentacene near the edge of the source/drain electrodes, the contact resistance between the source/drain and the pentacene was reduced significantly, thereby enhancing the electrical performance of OTFTs. The mechanism for the enhanced performance was also verified by a physics-based numerical simulation. (C) 2012 Elsevier B.V. All rights reserved.