Coating of activated carbon with silicon carbide by chemical vapour deposition

被引:33
|
作者
Moene, R
Boon, HT
Schoonman, J
Makkee, M
Moulijn, JA
机构
[1] DELFT UNIV TECHNOL,DEPT CHEM PROC TECHNOL,SECT IND CATALYSIS,2628 BL DELFT,NETHERLANDS
[2] DELFT UNIV TECHNOL,DEPT INORGAN CHEM & THERMODYNAM,SECT APPL INORGAN CHEM,2628 BL DELFT,NETHERLANDS
关键词
activated carbon; modification; chemical vapour deposition; silicon carbide; oxidation resistance; mechanical strength;
D O I
10.1016/0008-6223(95)00214-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Coating of activated carbon with silicon carbide by chemical vapour deposition (CVD) has been investigated to improve the oxidation resistance and the mechanical strength of activated carbon extrudates. The oxidation resistance has been analyzed by thermal gravimetric analysis in air; the temperature at the maximum rate of oxidation (T-max) is used to compare the modified carbons. Selective deposition of SiC by reacting SiCl4 with the carbon surface cannot be achieved below 1400 K. Silicon deposition has been encountered in all cases. Coating of activated carbon using a CH4/SiCl4 mixture results in SiC deposition at 1376 K. The oxidation resistance of this modified activated carbon has been improved by 150 K (T-max = 1025 K), while the side crushing strength improved by a factor 1.7. The residual surface area was 176 m(2)/g. SiC coatings have also been obtained by decomposing CH3SiCl3 at temperatures above 1200 K. The side crushing strength of the extrudates improved by a factor of 1.4, while the resistance against oxidation remained similar to that of the original carbon. The residual surface areas and pore volumes averaged 530 m(2)/g and 0.33 ml/g, respectively. Both methods of SiC deposition result in surface areas which are high enough for catalyst support applications. Evaluation of the infiltration performance of this SiC-CVD process using CH3SiCl3 shows that 20-95% of the SiC has been deposited inside the extrudates. The residual porosity of the extrudates is evaluated using a general mathematically developed chemical vapour infiltration design chart, which correlates initial Thiele moduli with the porosity after deposition. Good agreement is obtained between the experimental data and the design chart. Copyright (C) 1996 Elsevier Science Ltd
引用
收藏
页码:567 / 579
页数:13
相关论文
共 50 条
  • [21] Laser assisted chemical vapour deposition of silicon oxide layers
    Paiva, P
    Madelino, F
    Conde, O
    JOURNAL OF LUMINESCENCE, 1998, 80 (1-4) : 141 - 145
  • [22] Chemical vapor infiltration and deposition to produce a silicon carbide-carbon functionally gradient material
    Kawase, M
    Tago, T
    Kurosawa, M
    Utsumi, H
    Hashimoto, K
    CHEMICAL ENGINEERING SCIENCE, 1999, 54 (15-16) : 3327 - 3334
  • [23] Chemical vapor deposition of silicon carbide on carbon fibers with round and nonround cross-sections
    Popovska, N
    Emig, G
    Edie, DD
    Rhee, BS
    HIGH TEMPERATURE AND MATERIALS SCIENCE, 1997, 37 (01): : 1 - 11
  • [24] Mechanical and tribological characterisation of a diamond-like carbon coating applied by chemical vapour deposition on ceramic tiles
    Gilabert, Jessica
    Zumaquero, Eulalia
    Machi, Cristina
    Toledo, Julia
    Pilar Gomez-Tena, Maria
    BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 2015, 54 (05): : 209 - 218
  • [25] Surface Kinetic Mechanisms of Epitaxial Chemical Vapour Deposition of 4H Silicon Carbide Growth by Methyltrichlorosilane-H2 Gaseous System
    Song, Botao
    Gao, Bing
    Han, Pengfei
    Yu, Yue
    MATERIALS, 2022, 15 (11)
  • [26] Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS
    Frischmuth, Tobias
    Schneider, Michael
    Maurer, Daniel
    Grille, Thomas
    Schmid, Ulrich
    SENSORS AND ACTUATORS A-PHYSICAL, 2016, 247 : 647 - 655
  • [27] Characterization of Silicon Carbide Films Prepared by Chemical Vapor Deposition
    Meng Fantao
    Du Shanyi
    Zhang Yumin
    TESTING AND EVALUATION OF INORGANIC MATERIALS I, 2011, 177 : 78 - 81
  • [28] Low temperature plasma chemical vapour deposition of carbon nanotubes
    Wilson, JIB
    Scheerbaum, N
    Karim, S
    Polwart, N
    John, P
    Fan, Y
    Fitzgerald, AG
    DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) : 918 - 921
  • [29] Carbon spheres formed by hot filament chemical vapour deposition
    Vieira, S. M. C.
    Rego, C. A.
    Birkett, P. R.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (02) : 100 - 104
  • [30] Comparison of 2-amino benzyl alcohol adsorption onto activated carbon, silicon carbide nanoparticle and silicon carbide nanoparticle loaded on activated carbon
    Lemraski, Ensieh Ghasemian
    Palizban, Zeinab
    JOURNAL OF MOLECULAR LIQUIDS, 2015, 212 : 245 - 258