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Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA
Henan Univ, Inst Microsyst Phys, Kaifeng 475004, Peoples R China
Henan Univ, Sch Phys & Elect, Kaifeng 475004, Peoples R China Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA