Deep ion implantation: Advantages and current problems

被引：0

作者：

Slowinski, B

机构：

[1] Warsaw Univ Technol, Inst Phys, Warsaw, Poland

[2] Inst Atom Energy, Swierk Otwock, Poland

来源：

NUKLEONIKA | 1999年 / 44卷 / 02期

关键词：

D O I：

暂无

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The advantages of swift heavy ions (similar to 1 MeV/u) application for analysis and treating of solids in order to modify their properties are briefly summarised. As an illustration some examples of this application are also quoted.

引用

页码：271 / 275

页数：5