An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications

被引：17

作者：

Bartolucci, Giancarlo ^{[1
,2
]}

Marcelli, Romolo ^{[2
]}

Catoni, Simone ^{[2
]}

Margesin, Benno ^{[3
]}

Giacomozzi, Flavio ^{[3
]}

Mulloni, Viviana ^{[3
]}

Farinelli, Paola ^{[4
]}

机构：

[1] Univ Roma Tor Vergata, Dept Elect Engn, Via Politecn 1, I-00133 Rome, Italy

[2] CNR, IMM Roma, I-00133 Rome, Italy

[3] Fdn Bruno Kessler, Ctr Ric Sci & Tecnol, I-38050 Povo, TN, Italy

[4] Univ Perugia, Dept Elect & Informat Engn, I-06125 Perugia, Italy

来源：

JOURNAL OF APPLIED PHYSICS | 2008年 / 104卷 / 08期

关键词：

D O I：

10.1063/1.3003568

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements. (c) 2008 American Institute of Physics. [DOI: 10.1063/1.3003568]

引用

页数：8

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